US 12,344,523 B2
Neuromorphic micro-electro-mechanical-system device
Julien Sylvestre, Sherbrooke (CA); Bruno Barazani, Montreal (CA); and Guillaume Dion, Sherbrooke (CA)
Assigned to SOCPRA SCIENCES ET GENIE S.E.C., Sherbrooke (CA)
Appl. No. 17/414,981
Filed by SOCPRA SCIENCES ET GENIE S.E.C., Sherbrooke (CA)
PCT Filed Dec. 17, 2019, PCT No. PCT/CA2019/051832
§ 371(c)(1), (2) Date Jun. 17, 2021,
PCT Pub. No. WO2020/124219, PCT Pub. Date Jun. 25, 2020.
Claims priority of provisional application 62/780,589, filed on Dec. 17, 2018.
Prior Publication US 2022/0063989 A1, Mar. 3, 2022
Int. Cl. B81B 7/00 (2006.01); G05D 7/06 (2006.01)
CPC B81B 7/008 (2013.01) [G05D 7/06 (2013.01); B81B 2201/07 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/04 (2013.01); B81B 2207/03 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A micro-electro-mechanical-system (MEMS) device comprising:
an inertial component configured for being connected to a structure by a flexible connection allowing the inertial component to deform or move relative to the structure in response to an external stimulus applied to the structure;
at least one resonant component adapted to be connected to said structure or inertial component, the resonant component being movable relative to said structure and said inertial component, the resonant component having at least one resonant mode;
at least one transducing unit for measuring an oscillatory motion of the at least one resonant component relative to the inertial component and/or structure; and
an electronic control unit configured for applying a pump of electrostatic force to induce an oscillatory motion of the at least one resonant component in said resonant mode, the oscillatory motion being a non-linear function of a strength of the electrostatic force, wherein the at least one resonant component is configured to be coupled to the inertial component and/or the structure such that a deformation and/or motion of the inertial component in response to an external stimulus changes the strength of the electrostatic force, the electronic control unit configured for producing and outputting an output signal being a mathematical function of the measured oscillatory motion.