US 12,343,990 B2
Piezoelectric device, liquid ejecting head, and liquid ejecting apparatus
Motoki Takabe, Shiojiri (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Jan. 18, 2023, as Appl. No. 18/098,169.
Claims priority of application No. 2022-006260 (JP), filed on Jan. 19, 2022.
Prior Publication US 2023/0226817 A1, Jul. 20, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B41J 2/14 (2006.01); B41J 2/045 (2006.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01); H10N 30/87 (2023.01)
CPC B41J 2/04541 (2013.01) [B41J 2/04581 (2013.01); B41J 2/14233 (2013.01); H10N 30/2047 (2023.02); H10N 30/802 (2023.02); H10N 30/87 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A piezoelectric device comprising:
a substrate on which a plurality of recesses are arranged in a first direction;
a vibration plate; and
a piezoelectric actuator including a plurality of electrodes and a piezoelectric layer, and the plurality of electrodes including a first electrode, a second electrode, a third electrode, and a fourth electrode, wherein
the piezoelectric layer is stacked between the first electrode and the fourth electrode, between the second electrode and the fourth electrode, and between the third electrode and the fourth electrode,
a plurality of active portions in which the piezoelectric layer is interposed between the plurality of electrodes in a stacking direction are provided,
the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess when viewed in the stacking direction at both ends of the recess in the first direction,
the first electrode is formed between the second electrode and the third electrode in the first direction,
the second electrode, the third electrode, and the fourth electrode configure common electrodes for the plurality of active portions,
the first electrode configures an individual electrode provided independently for each of the active portions, and
in the stacking direction, a distance between the first electrode and the fourth electrode is the same as each of a distance between the second electrode and the fourth electrode and a distance between the third electrode and the fourth electrode.