| CPC B25J 9/1676 (2013.01) [G05B 2219/39505 (2013.01)] | 17 Claims |

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1. An apparatus comprising:
a contact shock transients sensing unit coupled to an end effector of a robot arm configured to carry a semiconductor wafer and configured to:
detect contact shock transients on the robot arm, and
generate a signal corresponding to contact shock transients; and
a control unit coupled to the contact shock transients sensing unit, the control unit is configured to:
measure an amount of the signal generated,
determine whether the amount of the signal exceeds one or more predetermined thresholds, and
execute one or more predetermined operations based on the determination, wherein the predetermined operation includes identifying a location of the robot arm in a manufacturing process where the amount of the signal exceeds the one or more predetermined thresholds.
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