| CPC A61L 27/54 (2013.01) [A61K 47/6901 (2017.08); A61L 27/28 (2013.01); A61L 31/10 (2013.01); A61L 31/16 (2013.01); B01J 19/0046 (2013.01); C03C 17/30 (2013.01); A61L 2400/18 (2013.01); A61L 2420/06 (2013.01); B01J 2219/00596 (2013.01); B01J 2219/00637 (2013.01); C03C 2218/31 (2013.01); C03C 2218/33 (2013.01)] | 19 Claims |

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1. A method for producing biofunctional fluorosilinated substrates comprising
a. coating a surface of a substrate with a fluorosilane to create at least one fluorosilane monolayer on the surface to provide a fluorosilinated surface on the substrate wherein the substrate comprises surface hydroxyl groups or has been treated to form surface hydroxyl groups;
b. plasma etching the fluorosilinated surface on the substrate to provide reactive functional groups on at least a portion of the fluorosilinated surface of the substrate; and
c. attaching biospecies to the reactive functional groups to obtain the biofunctional fluorosilinated substrates,
wherein the plasma etching in b is for about 10 seconds to about 1 minute and reduces the atomic percentage of fluorine on the substrate by no more than 10% as determined using xray photoelectron spectroscopy (XPS).
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