US 12,018,361 B2
Waveform shape factor for pulsed PVD power
Shouyin Zhang, Livermore, CA (US); and Keith A. Miller, Mountain View, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 6, 2022, as Appl. No. 17/858,592.
Application 17/858,592 is a continuation of application No. 17/535,638, filed on Nov. 25, 2021.
Claims priority of provisional application 63/147,215, filed on Feb. 8, 2021.
Claims priority of provisional application 63/118,158, filed on Nov. 25, 2020.
Prior Publication US 2022/0356559 A1, Nov. 10, 2022
Int. Cl. C23C 14/54 (2006.01); C23C 14/28 (2006.01); H01J 37/32 (2006.01); H05H 1/00 (2006.01)
CPC C23C 14/54 (2013.01) [C23C 14/28 (2013.01); H01J 37/32917 (2013.01); H05H 1/0081 (2013.01); H05H 2242/20 (2021.05)] 9 Claims
OG exemplary drawing
 
1. A power supply comprising a self-diagnostic function that indicates a malfunction, the self-diagnostic function comprising a controller configured to determine a waveform shape change index Is in real-time using Equation (VI),

OG Complex Work Unit Math
where St is the average waveform shape factor, S0 is an average reference waveform shape factor.