CPC C23C 14/54 (2013.01) [C23C 14/28 (2013.01); H01J 37/32917 (2013.01); H05H 1/0081 (2013.01); H05H 2242/20 (2021.05)] | 9 Claims |
1. A power supply comprising a self-diagnostic function that indicates a malfunction, the self-diagnostic function comprising a controller configured to determine a waveform shape change index Is in real-time using Equation (VI),
![]() where St is the average waveform shape factor, S0 is an average reference waveform shape factor.
|