US 12,017,213 B2
Device and method for direct printing of microfluidic chip based on large-format array femtosecond laser
Heping Zeng, Chongqing (CN); Chuan Yang, Chongqing (CN); Mengyun Hu, Shanghai (CN); and Shuai Yuan, Chongqing (CN)
Assigned to Chongqing Institute of East China Normal University, Chongqing (CN); SHANGHAI LANGYAN OPTOELECTRONICS TECHNOLOGY CO., LTD., Shanghai (CN); and East China Normal University, Shanghai (CN)
Filed by Chongqing Institute of East China Normal University, Chongqing (CN); SHANGHAI LANGYAN OPTOELECTRONICS TECHNOLOGY CO., LTD., Shanghai (CN); and East China Normal University, Shanghai (CN)
Filed on Jun. 1, 2021, as Appl. No. 17/336,222.
Prior Publication US 2021/0299658 A1, Sep. 30, 2021
Int. Cl. B01L 3/00 (2006.01); B23K 26/03 (2006.01); B23K 26/06 (2014.01); B81C 1/00 (2006.01); G06F 30/3308 (2020.01)
CPC B01L 3/502707 (2013.01) [B23K 26/032 (2013.01); B23K 26/0643 (2013.01); B81C 1/00119 (2013.01); B81C 1/00539 (2013.01); G06F 30/3308 (2020.01)] 20 Claims
OG exemplary drawing
 
1. A method for direct printing of a microfluidic chip based on a large-format array femtosecond laser, comprising:
(1) pre-amplifying a seed light followed by splitting the seed light through a pulse splitting device to form an m×n array laser; performing pre-amplification and pre-compression multiple times on each laser beam of the array laser; regulating a phase, a light intensity, a polarization, a center wavelength, and a pulse width of each laser beam of the array laser, respectively, to output the large-format array femtosecond laser;
(2) allowing the large-format array femtosecond laser to pass through a reflecting mirror array element device; regulating a combination of laser beams to form a plurality of beam interference groups varying in the number of laser beams for large-format femtosecond laser interference; regulating a combination and an exposure method of each of the plurality of beam interference groups followed by superposition of multiple exposures to output a desired pattern, thereby enabling femtosecond laser interference direct printing processing of the microfluidic chip;
(3) allowing the large-format array femtosecond laser to passes through the reflecting mirror array element device; regulating laser beams in a specific area to perform a selected-area interference at a specific position, to realize a femtosecond laser-based selected-area interference direct printing processing on the microfluidic chip, and an ablation processing in a selected area with a specific location and a specific feature;
(4) subjecting the microfluidic chip to layering to divide the microfluidic chip into three types of feature areas comprising a complex variable section micro-channel area, a simple fixed section micro-channel area, and a non-processing feature area; and according to a feature of layered areas of the microfluidic chip from bottom to top, intelligently regulating processing methods to realize processing of the microfluidic chip; and
(5) subjecting the microfluidic chip after direct printing to ultrasonic-assisted etching in a hydrofluoric acid solution to dredge micro-channels inside the microfluidic chip, thereby forming complex three-dimensional micro-channels on the microfluidic chip.