US 12,342,641 B2
Pixel with an improved quantum efficiency having a micro-lens and a diffractive structure
Raul Andres Bianchi, Myans (FR); Marios Barlas, Grenoble (FR); Alexandre Lopez, Edinburgh (GB); Bastien Mamdy, Le Versoud (FR); Bruce Rae, Edinburgh (GB); and Isobel Nicholson, Edinburgh (GB)
Assigned to STMICROELECTRONICS (RESEARCH & DEVELOPMENT) LIMITED, Marlow (GB); and STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed by STMICROELECTRONICS (RESEARCH & DEVELOPMENT) LIMITED, Marlow (GB); and STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed on Jun. 14, 2024, as Appl. No. 18/744,359.
Application 18/744,359 is a continuation of application No. 17/471,049, filed on Sep. 9, 2021, granted, now 12,051,705.
Claims priority of application No. 20200100550 (GR), filed on Sep. 11, 2020; and application No. 2010469 (FR), filed on Oct. 13, 2020.
Prior Publication US 2024/0339464 A1, Oct. 10, 2024
Int. Cl. H10F 39/00 (2025.01); G02B 5/18 (2006.01); H10F 39/12 (2025.01)
CPC H10F 39/8023 (2025.01) [H10F 39/805 (2025.01); G02B 5/18 (2013.01); G02B 5/1814 (2013.01); G02B 5/1819 (2013.01); G02B 5/1828 (2013.01); G02B 5/1842 (2013.01); H10F 39/199 (2025.01); H10F 39/8027 (2025.01); H10F 39/8033 (2025.01); H10F 39/807 (2025.01)] 20 Claims
OG exemplary drawing
 
1. A pixel, comprising:
a substrate;
a photodiode in the substrate between a first face of the substrate and a second face that is opposite the first face of the substrate, the photodiode including a first lateral surface transverse to the first and second faces of the substrate;
a first layer of a first material with a refractive index lower than a refractive index of the substrate on the first lateral surface of the photodiode;
an anti-reflective layer on the second face of the substrate;
a micro-lens on the anti-reflective layer; and
a diffractive structure on the photodiode on the second face of the substrate, the diffractive structure including a first grating pattern in a first orientation, a second grating pattern immediately adjacent to and distinct from the first grating pattern.