US 12,341,490 B2
Low loss transversely-excited film bulk acoustic resonators and filters
Bryant Garcia, Mississauga (CA); and Greg Dyer, Santa Barbara, CA (US)
Assigned to Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jun. 30, 2022, as Appl. No. 17/855,711.
Application 17/855,711 is a continuation in part of application No. 17/555,349, filed on Dec. 17, 2021.
Application 17/555,349 is a continuation in part of application No. 17/229,767, filed on Apr. 13, 2021, granted, now 12,040,779.
Claims priority of provisional application 63/244,565, filed on Sep. 15, 2021.
Claims priority of provisional application 63/196,645, filed on Jun. 3, 2021.
Claims priority of provisional application 63/074,991, filed on Sep. 4, 2020.
Claims priority of provisional application 63/066,520, filed on Aug. 17, 2020.
Claims priority of provisional application 63/012,849, filed on Apr. 20, 2020.
Prior Publication US 2022/0352873 A1, Nov. 3, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/54 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01)
CPC H03H 9/54 (2013.01) [H03H 9/0211 (2013.01); H03H 9/13 (2013.01); H03H 9/17 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator device comprising:
a diaphragm comprising a portion of a piezoelectric layer that is over a cavity; and
a conductor pattern on a surface of the piezoelectric layer, the conductor pattern comprising:
an interdigital transducer (IDT) comprising a first busbar, a second busbar, and a plurality of interleaved fingers, wherein the plurality of interleaved fingers extend alternately from the first and second busbars and overlapping portions of the plurality of interleaved fingers are on the diaphragm;
first and second reflector elements on the diaphragm proximate to a first finger of the plurality of interleaved fingers; and
third and fourth reflector elements on the diaphragm proximate to a last finger of the plurality of interleaved fingers,
wherein:
pr1 is a center-to-center distance between the first and second reflector elements and a center-to-center distance between the third and fourth reflector elements,
p is a pitch that is a center-to-center distance between two adjacent interleaved fingers of the plurality of interleaved fingers, and
1.1p≤pr1≤1.5p.