US 12,341,486 B2
Multi-layer raised frame in bulk acoustic wave device
Kwang Jae Shin, Yongin (KR); and Jiansong Liu, Fremont, CA (US)
Assigned to Skyworks Global Pte. Ltd., Singapore (SG)
Filed by Skyworks Global Pte. Ltd., Singapore (SG)
Filed on Mar. 20, 2024, as Appl. No. 18/610,765.
Application 18/610,765 is a continuation of application No. 17/364,479, filed on Jun. 30, 2021, granted, now 11,967,939.
Application 17/364,479 is a continuation of application No. 16/576,529, filed on Sep. 19, 2019, granted, now 11,082,023, issued on Aug. 3, 2021.
Claims priority of provisional application 62/760,470, filed on Nov. 13, 2018.
Claims priority of provisional application 62/735,523, filed on Sep. 24, 2018.
Prior Publication US 2024/0305263 A1, Sep. 12, 2024
Int. Cl. H03H 9/02 (2006.01); H03F 3/189 (2006.01); H03H 9/05 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01); H03H 9/70 (2006.01); H03F 3/20 (2006.01); H04B 1/3827 (2015.01)
CPC H03H 9/02118 (2013.01) [H03F 3/189 (2013.01); H03H 9/0561 (2013.01); H03H 9/13 (2013.01); H03H 9/173 (2013.01); H03H 9/175 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 9/706 (2013.01); H03F 3/20 (2013.01); H03F 2200/294 (2013.01); H03F 2200/451 (2013.01); H04B 1/3827 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A bulk acoustic wave device comprising:
an air cavity;
a piezoelectric layer over the air cavity;
a first electrode positioned between the piezoelectric layer and the air cavity;
a second electrode over the piezoelectric layer; and
a multi-layer raised frame structure including a first raised frame layer and a second raised frame layer, the second raised frame layer having an acoustic impedance that is higher than an acoustic impedance of the first raised frame layer, the acoustic impedance of the first raised frame layer being lower than an acoustic impedance of the first electrode, and the second raised frame layer overlapping with the first raised frame layer over the air cavity.