US 12,341,045 B2
Parallel transfer apparatus
Hyunjae Kang, Suwon-si (KR); Sangmin Kim, Hwaseong-si (KR); Youngwook Kim, Seoul (KR); Chuljun Park, Seoul (KR); Jaesung Byun, Suwon-si (KR); Sangkyung Lee, Hwaseong-si (KR); Hyunwoo Lee, Hwaseong-si (KR); and Junhyuk Chang, Seoul (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Nov. 7, 2022, as Appl. No. 17/981,685.
Claims priority of application No. 10-2021-0158372 (KR), filed on Nov. 17, 2021.
Prior Publication US 2023/0154779 A1, May 18, 2023
Int. Cl. H01L 21/677 (2006.01); B65G 17/12 (2006.01); H01F 7/02 (2006.01)
CPC H01L 21/67766 (2013.01) [B65G 17/12 (2013.01); H01F 7/02 (2013.01); B65G 2201/0297 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A transfer apparatus comprising:
a mast portion comprising a base portion and a protrusion portion protruding from the base portion; and
a plurality of shuttles configured to move along the mast portion, thereby transferring a carrier,
wherein the mast portion comprises a first magnet track fixed to a first sidewall of the protrusion portion, a second magnet track fixed to a second sidewall of the protrusion portion, and a guide fixed to a third sidewall of the protrusion portion,
wherein the third sidewall of the protrusion portion is directly connected to each of the first and second sidewalls and forms an angle with respect to each of the first and second sidewalls,
wherein each of the plurality of shuttles comprises a first coil portion adjacent to the first magnet track in a horizontal direction, and a second coil portion adjacent to the second magnet track in the horizontal direction, and a guide block fixed to the shuttle and engaging with the guide, and
wherein the protrusion portion, the first magnet track, and the second magnet track are disposed between the first and second coil portions.