US 12,341,043 B2
Modular material handling robot platform
Martin Hosek, Lowell, MA (US); and Sripati Sah, Wakefield, MA (US)
Assigned to Persimmon Technologies Corporation, Wakefield, MA (US)
Filed by Persimmon Technologies Corporation, Wakefield, MA (US)
Filed on Feb. 5, 2024, as Appl. No. 18/432,192.
Application 18/432,192 is a division of application No. 16/788,973, filed on Feb. 12, 2020, granted, now 11,929,276.
Claims priority of provisional application 62/805,532, filed on Feb. 14, 2019.
Prior Publication US 2024/0178027 A1, May 30, 2024
Int. Cl. B25J 5/02 (2006.01); B25J 9/00 (2006.01); B25J 9/12 (2006.01); B25J 11/00 (2006.01); B25J 19/00 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67709 (2013.01) [B25J 5/02 (2013.01); B25J 9/0009 (2013.01); B25J 19/0045 (2013.01); B25J 9/123 (2013.01); B25J 11/0095 (2013.01); H01L 21/67706 (2013.01); H01L 21/67742 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A method comprising:
connecting a first base plate assembly inside a vacuum chamber, where the first base plate assembly comprises a first base plate and a first plurality of transport guides on a top side of the first base plate; and
connecting a second base plate assembly inside the vacuum chamber, where the second base plate assembly comprises a second base plate, where an end of the second base plate is connected to an end of the first base plate,
where the first base plate assembly comprises at least one alignment feature configured to align the end of the first base plate to the end of the second base plate, where the first base plate is configured to provide, in combination with the second base plate, a structural platform inside the vacuum chamber for a robot drive to move in the vacuum chamber along the first plurality of transport guides.