US 12,341,026 B2
Chemical dispensing system
Ming-Chieh Hsu, Hsinchu (TW); Yung-Long Chen, New Taipei (TW); Fang-Pin Chiang, Taichung (TW); Feng-An Yang, Hsinchu (TW); Ching-Jung Hsu, Hsinchu (TW); and Chi-Tung Lai, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Aug. 10, 2023, as Appl. No. 18/447,353.
Application 18/447,353 is a continuation of application No. 16/887,647, filed on May 29, 2020, granted, now 11,817,329.
Prior Publication US 2023/0386867 A1, Nov. 30, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/67 (2006.01); H01L 21/306 (2006.01)
CPC H01L 21/67017 (2013.01) [H01L 21/306 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A chemical dispensing system, comprising:
a first chemical supply line configured to:
provide a semiconductor processing chemical in a day tank to a production point of use (POU) manifold when the chemical dispensing system is in a first independent production and test configuration, and
provide the semiconductor processing chemical in the day tank to a chemical test POU manifold when the chemical dispensing system is in a second independent production and test configuration; and
a second chemical supply line configured to:
provide the semiconductor processing chemical in a storage drum to the chemical test POU manifold when the chemical dispensing system is in the first independent production and test configuration,
wherein the first chemical supply line is different from the second chemical supply line when the chemical dispensing system is in the first independent production and test configuration, and
wherein the first chemical supply line is configured to simultaneously provide the semiconductor processing chemical in the day tank to the production POU manifold while the second chemical supply line provides the semiconductor processing chemical in the storage drum to the chemical test POU manifold when the chemical dispensing system is in the first independent production and test configuration, and
provide the semiconductor processing chemical in the storage drum to the production POU manifold when the chemical dispensing system is in the second independent production and test configuration.