US 12,340,994 B2
Measurement apparatus for alternating currents and voltages of physical plasmas, particularly of cold plasmas at atmospheric pressure, and plasma generator comprising such a measurement apparatus
Mario Hesse, Göttingen (DE); Jannik Schulz, Göttingen (DE); Roland Damm, Ebergötzen (DE); and Wolfgang Viöl, Adelebsen (DE)
Assigned to Hochschule für angewandte Wissenschaft und Kunst Hildesheim/Holzminden/Göttingen, Hildesheim (DE)
Filed by Hochschule für angewandte Wissenschaft und Kunst Hildesheim/Holzminden/Göttingen, Hildesheim (DE)
Filed on Jul. 27, 2023, as Appl. No. 18/226,841.
Claims priority of application No. 22187261 (EP), filed on Jul. 27, 2022.
Prior Publication US 2024/0038512 A1, Feb. 1, 2024
Int. Cl. H01J 37/32 (2006.01); H05H 1/00 (2006.01); H05H 1/24 (2006.01)
CPC H01J 37/32981 (2013.01) [H01J 37/32577 (2013.01); H01J 37/32642 (2013.01); H05H 1/0018 (2013.01); H05H 1/2425 (2021.05)] 17 Claims
OG exemplary drawing
 
1. A measurement apparatus for alternating currents and alternating voltages of a physical plasma ignited in a working gas by applying an alternating high voltage provided by an alternating high voltage source with respect to the reference potential to a plasma electrode via a high voltage line, the measurement apparatus comprising
a current transformer having a ring core and a measurement winding on the ring core, the measurement winding having two ends and a center tap,
a cable guide configured for guiding the high voltage line in a defined relative arrangement through the ring core,
a measurement resistor connected between the two ends of the measurement winding, wherein a first measurement alternating voltage dropping over the measurement resistor is a first strictly monotonic increasing function of an amperage of the alternating currents flowing through the high voltage line to the plasma electrode, and
a measurement capacitance connected between the center tap of the measurement winding and a reference potential connector, wherein a second measurement voltage dropping over the measurement capacitance is a second strictly monotonic increasing function of an amplitude of the alternating high voltage applied to the plasma electrode with respect to the reference potential present at the reference potential connector.