US 12,340,984 B2
Radio frequency power return path
Luke Bonecutter, Cedar Park, TX (US); David Blahnik, Austin, TX (US); Tuan Anh Nguyen, San Jose, CA (US); and Amit Kumar Bansal, Milpitas, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 29, 2020, as Appl. No. 16/941,994.
Claims priority of provisional application 62/882,234, filed on Aug. 2, 2019.
Prior Publication US 2021/0032748 A1, Feb. 4, 2021
Int. Cl. H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/458 (2006.01); C23C 16/505 (2006.01)
CPC H01J 37/32568 (2013.01) [C23C 16/4585 (2013.01); C23C 16/4586 (2013.01); H01J 37/32174 (2013.01); H01J 37/32577 (2013.01); H01J 37/32715 (2013.01); C23C 16/4409 (2013.01); C23C 16/505 (2013.01); H01J 37/32082 (2013.01); H01J 37/32091 (2013.01); H01J 37/32513 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a chamber body and a lid defining a volume therein;
a dielectric plate physically separating and electrically isolating the chamber body and the lid;
a substrate support disposed in the volume opposite the lid, the substrate support comprising:
a support body disposed on a stem, the support body including a central region and a peripheral region radially outward of the central region, the central region having a thickness less than a thickness of the peripheral region;
a ground plate disposed between the support body and the stem; and
a flange adjacent to a bottom surface of the peripheral region and coupled to the ground plate, the flange extending radially outward of an outer edge of the peripheral region;
a conductive rod extending through the stem, coupled to the ground plate and adapted for coupling to a ground; and
a grounding arrangement disposed about the support body and coupled to the ground plate, the grounding arrangement actuatable to physically contact the dielectric plate.