US 12,340,978 B2
Symmetric and irregular shaped plasmas using modular microwave sources
Thai Cheng Chua, Cupertino, CA (US); Farzad Houshmand, Mountain View, CA (US); Christian Amormino, San Jose, CA (US); and Philip Allan Kraus, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 6, 2020, as Appl. No. 16/921,716.
Application 16/921,716 is a continuation of application No. 15/485,217, filed on Apr. 11, 2017, granted, now 10,707,058.
Prior Publication US 2020/0402769 A1, Dec. 24, 2020
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32266 (2013.01) [H01J 37/3222 (2013.01); H01J 37/32238 (2013.01); H01J 37/32247 (2013.01); H01J 37/3299 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A plasma processing chamber, comprising:
a dielectric body that forms a portion of an outer wall of the processing chamber, wherein the dielectric body comprises a first surface, a second surface opposite from the first surface, and a third surface between the first surface and the second surface;
an array of applicators, wherein each applicator comprises a dielectric resonant cavity and a monopole extending into a channel in the dielectric resonant cavity, wherein the dielectric resonant cavity comprises a dielectric material laterally surrounding sides of the monopole and beneath an end of the monopole, wherein a portion of the channel separates the end of the monopole from the dielectric material, wherein a position of the monopole is adjustable relative to a position of the dielectric resonant cavity, wherein each applicator is supported by the third surface, wherein a cross-section of a portion of the dielectric material of the dielectric resonant cavity proximate to the third surface is wider than a cross-section of a portion of the dielectric material of the dielectric resonant cavity proximate to the channel, and wherein the portion of the dielectric material of the dielectric resonant cavity proximate to the third surface has a symmetrical polygon shape in a first plane perpendicular to the monopole, and the portion of the dielectric material of the dielectric resonant cavity proximate to the channel has a circular shape in a second plane perpendicular to the monopole.