US 12,340,970 B2
Charged particle beam device, and method for controlling charged particle beam device
Shingo Hayashi, Tokyo (JP); Hideyuki Kazumi, Tokyo (JP); Zhaohui Cheng, Tokyo (JP); and Hideto Dohi, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/914,488
Filed by HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
PCT Filed May 13, 2020, PCT No. PCT/JP2020/019166
§ 371(c)(1), (2) Date Sep. 26, 2022,
PCT Pub. No. WO2021/229732, PCT Pub. Date Nov. 18, 2021.
Prior Publication US 2023/0113759 A1, Apr. 13, 2023
Int. Cl. H01J 37/141 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/141 (2013.01) [H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 37/1475 (2013.01); H01J 2237/1405 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/2448 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A charged particle beam device that irradiates a sample with a charged particle beam, the device comprising:
a magnetic field lens that generates a magnetic field for changing the traveling direction of the charged particle beam; and
a current controller that controls an excitation current of the magnetic field lens,
wherein the current controller generates the excitation current by combining a direct current and an alternating current,
wherein the current controller gradually changes the current level of the direct current, and
wherein the current controller combines the alternating current with each stage of the direct current that gradually changes.