US 12,340,276 B2
Device for controlling trapped ions with low heat dissipation
Alexander Zesar, Villach (AT); Silke Katharina Auchter, Villach (AT); Matthias German Dietl, Villach (AT); Peter Oles, Villach (AT); Lina Purwin, Villach (AT); Clemens Rössler, Villach (AT); and Helmut Heinrich Schoenherr, Villach (AT)
Assigned to Infineon Technologies Austria AG, Villach (AT)
Filed by Infineon Technologies Austria AG, Villach (AT)
Filed on Sep. 27, 2022, as Appl. No. 17/953,455.
Claims priority of application No. 21200168 (EP), filed on Sep. 30, 2021.
Prior Publication US 2023/0094771 A1, Mar. 30, 2023
Int. Cl. G06N 10/40 (2022.01); G21K 1/00 (2006.01)
CPC G06N 10/40 (2022.01) [G21K 1/003 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A device for controlling trapped ions, the device comprising:
a substrate;
a first metal layer disposed over the substrate;
an insulating layer disposed over the first metal layer; and
a structured second metal layer disposed over the insulating layer, the structured second metal layer comprising an electrode of an ion trap configured to trap ions in a space above the structured second metal layer, the electrode of the structured second metal layer and the first metal layer overlapping each other; and
a void space in the insulating layer between the first metal layer and the electrode of the structured second metal layer, the void space comprising a vacuum at least during operation of the device.