US 12,339,717 B2
Discrete time loop based thermal control
Jui-Cheng Huang, Hsinchu (TW); Yi-Hsing Hsiao, Hsin-Chu (TW); Yu-Jie Huang, Hsin-Chu (TW); Tung-Tsun Chen, Hsinchu (TW); and Allen Timothy Chang, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on Feb. 20, 2024, as Appl. No. 18/582,482.
Application 18/582,482 is a continuation of application No. 17/543,542, filed on Dec. 6, 2021, granted, now 11,934,239.
Application 17/543,542 is a continuation of application No. 16/441,637, filed on Jun. 14, 2019, granted, now 11,209,878.
Claims priority of provisional application 62/712,685, filed on Jul. 31, 2018.
Prior Publication US 2024/0192744 A1, Jun. 13, 2024
Int. Cl. G06F 1/04 (2006.01); G06F 1/12 (2006.01); G06F 1/20 (2006.01); G06F 5/06 (2006.01)
CPC G06F 1/206 (2013.01) [G06F 1/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A discrete time loop based control system, comprising:
an error amplifier;
a temperature sensor coupled to an input of the error amplifier;
a discrete time controller coupled to an output of the error amplifier; and
a quantizer configured to produce a digital code for control of a heater, wherein the temperature sensor is configured to produce a value that characterizes the digital code output by the quantizer, wherein the heater comprises a plurality of heating elements each comprising a respective resistor coupled to a respective switch, wherein the respective switch comprises a first terminal, a second terminal and a third terminal, wherein the first terminal is connected to the respective resistor, the second terminal is connected to a ground, and the third terminal is controlled by a respective bit of the digital code output, and wherein the discrete time controller is configured to produce a control signal for controlling the quantizer.