US 12,339,585 B2
Polycarbonate heat molding for soft lithography
Philip R. LeDuc, Pittsburgh, PA (US); and Utku Sonmez, Pittsburgh, PA (US)
Assigned to CARNEGIE MELLON UNIVERSITY, Pittsburgh, PA (US)
Filed by CARNEGIE MELLON UNIVERSITY, Pittsburgh, PA (US)
Filed on Feb. 25, 2022, as Appl. No. 17/681,676.
Claims priority of provisional application 63/153,423, filed on Feb. 25, 2021.
Prior Publication US 2022/0269168 A1, Aug. 25, 2022
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/0017 (2013.01) 16 Claims
OG exemplary drawing
 
1. A method of replicating a master mold of a microsystem having a plurality of features, the method comprising:
forming a replica mold from the master mold, wherein the replica mold comprises an elastomer and has negative features of the master mold;
placing a solid sheet of a polymer on the surface of the replica mold;
heating the sheet and the replica mold to a temperature above the glass transition temperature of the polymer;
maintaining the temperature for a period of time sufficient to allow the polymer to disperse into the negative features of the replica mold absent an application of an external force to the polymer;
cooling the polymer below the glass transition temperature, forming a solid polymer; and
removing the replica mold from the polymer, wherein the solidified polymer forms a copy mold and has the shape of the master mold.