US 12,339,477 B2
Amorphous or nanocrystalline molybdenum nitride and silicon nitride multilayers
Catherine Burcklen, Oakland, CA (US); Tommaso Pardini, Oakland, CA (US); and Regina Soufli, Berkeley, CA (US)
Assigned to Lawrence Livermore National Security, LLC, Livermore, CA (US)
Filed by Lawrence Livermore National Security, LLC, Livermore, CA (US)
Filed on May 26, 2020, as Appl. No. 16/883,787.
Prior Publication US 2021/0373212 A1, Dec. 2, 2021
Int. Cl. C23C 14/06 (2006.01); C23C 14/00 (2006.01); C23C 14/35 (2006.01); G02B 5/08 (2006.01); G02B 5/28 (2006.01); G03F 7/00 (2006.01)
CPC G02B 5/285 (2013.01) [C23C 14/0036 (2013.01); C23C 14/0641 (2013.01); C23C 14/0652 (2013.01); C23C 14/35 (2013.01); G02B 5/0891 (2013.01); G02B 5/283 (2013.01); G03F 7/70958 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A product, comprising:
a first layer consisting essentially of Mo1-xNx, where x=greater than 0 to 0.8; and
a second layer formed directly adjacent the first layer, the second layer consisting essentially of Si1-yNy, where y=greater than 0 to 0.8,
wherein the first layer is substantially amorphous or is substantially nanocrystalline,
wherein the first layer and the second layer form a set having an interface therebetween, wherein a plurality of sets is present in a laminate of the sets.