US 12,339,238 B2
Inspection device and inspection method
Shozo Oshio, Osaka (JP); Mitsuru Nitta, Kyoto (JP); and Ryosuke Shigitani, Osaka (JP)
Assigned to Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
Appl. No. 18/275,945
Filed by Panasonic Intellectual Property Management Co., Ltd., Osaka (JP)
PCT Filed Feb. 1, 2022, PCT No. PCT/JP2022/003778
§ 371(c)(1), (2) Date Aug. 4, 2023,
PCT Pub. No. WO2022/176596, PCT Pub. Date Aug. 25, 2022.
Claims priority of application No. 2021-026793 (JP), filed on Feb. 22, 2021.
Prior Publication US 2024/0118220 A1, Apr. 11, 2024
Int. Cl. G01N 21/94 (2006.01); G01N 21/25 (2006.01); G01N 21/31 (2006.01); G01N 21/359 (2014.01); G01N 21/64 (2006.01); G01N 21/84 (2006.01); G01N 21/88 (2006.01); G01N 33/02 (2006.01); H10H 20/851 (2025.01)
CPC G01N 21/94 (2013.01) [G01N 21/359 (2013.01); G01N 21/64 (2013.01); G01N 21/8806 (2013.01); G01N 33/02 (2013.01); G01N 21/255 (2013.01); G01N 21/31 (2013.01); G01N 21/3151 (2013.01); G01N 2021/3155 (2013.01); G01N 2021/3181 (2013.01); G01N 21/84 (2013.01); G01N 2201/06193 (2013.01); H10H 20/851 (2025.01)] 15 Claims
OG exemplary drawing
 
1. An inspection device comprising:
a light source including a phosphor configured to irradiate an inspection object with inspection light; and
a photodetector configured to detect reflected light of the inspection light, wherein
a spectral distribution of the inspection light has at least one local maximum spectral intensity value derived from fluorescence emitted by the phosphor,
there are two local maximum spectral intensity values within a wavelength range of 500 nm or more and less than or equal to 1000 nm,
a maximum spectral intensity value is within a wavelength range of 600 nm or more and less than or equal to 750 nm,
when a spectral intensity value Pmax equals the maximum spectral intensity value, a largest value of the spectral intensity in a wavelength range longer than 750 nm is within a range of 20% or more of Pmax and less than or equal to 100% of Pmax, and
the spectral intensity value within a wavelength range of 500 nm or more and less than or equal to 550 nm is less than 20% of Pmax.