US 12,339,223 B2
Measuring apparatus and testing apparatus having the same
Yasuhiro Hidaka, Yokohama (JP); and Ingi Kim, Suwon-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-Do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Jun. 14, 2023, as Appl. No. 18/334,789.
Claims priority of application No. 2022-194644 (JP), filed on Dec. 6, 2022; and application No. 10-2023-0014690 (KR), filed on Feb. 3, 2023.
Prior Publication US 2024/0183777 A1, Jun. 6, 2024
Int. Cl. G01N 21/3581 (2014.01)
CPC G01N 21/3581 (2013.01) [G01N 2201/06113 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A measuring apparatus, comprising:
a first beam splitter configured to split a pulsed laser beam into a pump beam and a trigger beam;
an amplitude modulation element on a light path of the pump beam;
a diffraction grating configured to disperse the pump beam;
an optical illumination system configured to illuminate a specimen to condense the dispersed pump beam on a measurement portion of the specimen;
an optical condensing system configured to condense an electromagnetic wave radiated from the specimen illuminated by the pump beam;
a delay mechanism configured to change a light path length of the trigger beam;
a time domain detector configured to detect the electromagnetic wave condensed by the optical condensing system, for each time when the trigger beam, the light path length of which has been changed in the delay mechanism, is incident; and
a controller configured to lock-in detect the electromagnetic wave detected by the time domain detector with a driving frequency of the amplitude modulation element,
wherein the controller is configured to perform a Fourier transform on a time domain waveform of the detected electromagnetic wave to obtain a frequency domain waveform, and obtain a magnitude and a direction of an electric field of the measurement portion by filtering a frequency band from the obtained frequency domain waveform.