US 12,339,190 B2
Pressure sensor
Masanori Kobayashi, Tokyo (JP); Ken Unno, Tokyo (JP); Tetsuya Sasahara, Tokyo (JP); and Kohei Nawaoka, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Appl. No. 17/790,988
Filed by TDK CORPORATION, Tokyo (JP)
PCT Filed Feb. 15, 2021, PCT No. PCT/JP2021/005556
§ 371(c)(1), (2) Date Dec. 6, 2022,
PCT Pub. No. WO2021/166853, PCT Pub. Date Aug. 26, 2021.
Claims priority of application No. 2020-027866 (JP), filed on Feb. 21, 2020.
Prior Publication US 2023/0131075 A1, Apr. 27, 2023
Int. Cl. G01L 9/00 (2006.01)
CPC G01L 9/0001 (2013.01) [G01L 9/0042 (2013.01); G01L 9/0051 (2013.01); G01L 9/0055 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A pressure sensor comprising:
a membrane generating a deformation in response to pressure;
a first gauge layer formed on the membrane;
an intermediate insulating layer formed on the first gauge layer;
a second gauge layer formed on the intermediate insulating layer; and
an electrode layer that is in contact with an upper surface of the first gauge layer exposed from both the intermediate insulating layer and the second gauge layer, and in contact with an upper surface of the second gauge layer, and that connects the first gauge layer and the second gauge layer,
wherein the first gauge layer and the second gauge layer include a first | sensor and a second sensor detecting the deformation of the membrane, respectively, and
a distance from a surface of the membrane to the second sensor is within 30 μm.