| CPC G01C 25/005 (2013.01) [G01C 19/5691 (2013.01); G01C 19/5776 (2013.01)] | 20 Claims |
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1. A method for calibrating a micro-electro-mechanical system (MEMS) gyroscopes, the method comprising:
during a characterization phase:
a) controlling a first subset of the MEMS gyroscopes to vibrate masses of the first subset of the MEMS gyroscopes;
b) determining a plurality of variates including quadrature and inphase values from output data of the first subset of the MEMS gyroscopes;
c) determining offset temperature coefficients to minimize erroneous output data of the first subset of the MEMS gyroscopes over temperature variation;
d) computing a linear regression using the quadrature and inphase values and the offset temperature coefficients determined for the first subset of the MEMS gyroscopes to determine linear regression variate coefficients for predicting the offset temperature coefficient based on the quadrature and inphase values; and
during a production factory trim phase:
e) controlling a second subset of the MEMS gyroscopes to vibrate masses of the second subset of the MEMS gyroscopes;
f) determining a plurality of variates including quadrature and inphase values from output data of the second subset of the MEMS gyroscopes;
g) determining a predicted offset temperature coefficient based on the quadrature and inphase values and the linear regression variate coefficients; and
h) programing the second subset of the MEMS gyroscopes to use the predicted offset temperature coefficient to adjust the output data during operation.
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