US 12,338,548 B2
Protective structure for silicon rod and method for manufacturing silicon rod
Junya Sakai, Yamaguchi (JP); and Kazuhiro Kawaguchi, Yamaguchi (JP)
Assigned to TOKUYAMA CORPORATION, Yamaguchi (JP)
Appl. No. 17/619,521
Filed by TOKUYAMA CORPORATION, Yamaguchi (JP)
PCT Filed May 28, 2020, PCT No. PCT/JP2020/021089
§ 371(c)(1), (2) Date Dec. 15, 2021,
PCT Pub. No. WO2020/255664, PCT Pub. Date Dec. 24, 2020.
Claims priority of application No. 2019-111967 (JP), filed on Jun. 17, 2019.
Prior Publication US 2022/0380935 A1, Dec. 1, 2022
Int. Cl. C30B 35/00 (2006.01); C01B 33/035 (2006.01); C30B 29/06 (2006.01)
CPC C30B 35/00 (2013.01) [C01B 33/035 (2013.01); C30B 29/06 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A protective structure for a silicon rod, the protective structure comprising:
a frame body that is shaped so as to surround a bottom plate of a reactor in which the silicon rod is contained; and
a protective wall surface that extends vertically upward from the frame body and that forms a storage space for the silicon rod,
the protective wall surface having a mesh structure having a mesh size of 2 Tyler mesh to 10 Tyler mesh,
the protective structure further comprising a protective plate which is provided between the frame body and the bottom plate of the reactor and which has a flat surface that extends so as to surround the bottom plate and that spreads horizontally,
the bottom plate having a bottom plate flange which is provided so as to surround the bottom plate,
the reactor being formed by the bottom plate and a cover, the cover having a cover flange which is provided so as to surround the cover, and
the frame body forming a circle having a diameter that is by 300 mm to 600 mm larger than an outer diameter of the bottom plate flange and the cover flange.