US 12,338,526 B2
Deposition apparatus
Masahiro Atsumi, Fuchu (JP)
Assigned to Canon Anelva Corporation, Kawasaki (JP)
Filed by Canon Anelva Corporation, Kawasaki (JP)
Filed on Oct. 11, 2023, as Appl. No. 18/484,808.
Application 18/484,808 is a continuation of application No. 16/860,646, filed on Apr. 28, 2020, granted, now 11,821,067.
Application 16/860,646 is a continuation of application No. 15/211,233, filed on Jul. 15, 2016, granted, now 10,676,813, issued on Jun. 9, 2020.
Application 15/211,233 is a continuation of application No. PCT/JP2014/005736, filed on Nov. 14, 2014.
Claims priority of application No. 2014-055570 (JP), filed on Mar. 18, 2014.
Prior Publication US 2024/0052477 A1, Feb. 15, 2024
Int. Cl. C23C 14/32 (2006.01); C23C 14/50 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); G11B 5/84 (2006.01); H01J 27/08 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01)
CPC C23C 14/325 (2013.01) [C23C 14/505 (2013.01); C23C 14/54 (2013.01); C23C 14/568 (2013.01); G11B 5/8408 (2013.01); H01J 27/08 (2013.01); H01J 37/32055 (2013.01); H01J 37/32064 (2013.01); H01J 37/32614 (2013.01); H01J 37/32944 (2013.01); H01J 37/34 (2013.01); H01J 37/3417 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A deposition apparatus which forms a film on a substrate, comprising:
a moving unit configured to move a target along a moving axis;
a striker configured to generate an arc discharge;
an anode arranged to face the target;
a driving unit configured to perform rotation-drive of the striker so as to make a close state which the striker closes to a side surface around the moving axis of the target to generate the arc discharge; and
a control unit that is configured to control movement of the target by the moving unit so as to change a facing position on the side surface of the target facing the striker in the state,
wherein an axis of the rotation-drive of the striker is parallel to the moving axis; and
wherein the control unit is further configured to automatically change the facing position on the side surface of the target each time the arc discharge is generated, and
wherein the driving unit drives the striker such that a distance between the anode and the striker in the close state becomes constant.