US 12,338,522 B2
Fine metal mask plate, mask device and tensioning equipment
Jianchang Cai, Beijing (CN); Longhui Xue, Beijing (CN); Wei Zhang, Beijing (CN); and Xingliang Xiao, Beijing (CN)
Assigned to CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/309,104
Filed by CHENGDU BOE OPTOELECTRONICS TECHNOLOGY CO., LTD., Sichuan (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Sep. 18, 2020, PCT No. PCT/CN2020/116159
§ 371(c)(1), (2) Date Apr. 23, 2021,
PCT Pub. No. WO2021/082791, PCT Pub. Date May 6, 2021.
Claims priority of application No. 201921843623.X (CN), filed on Oct. 30, 2019.
Prior Publication US 2022/0307120 A1, Sep. 29, 2022
Int. Cl. C23C 14/04 (2006.01); C23C 14/24 (2006.01)
CPC C23C 14/042 (2013.01) [C23C 14/24 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A fine metal mask plate, comprising:
a mask strip body being of a stripe-shaped shape and comprising two opposite long edges and two opposite short edges; and
a number of skirts arranged on each short edge is three and spaced apart from each other along an extension direction of the short edge;
wherein the three skirts on each short edge of the mask strip body comprise two end-part skirts arranged at end-part positions of the short edge, and a middle skirt located between the two end-part skirts;
wherein the mask strip body comprises welding areas adjacent to the short edges; each welding area is provided with a plurality of rows of welding spots, and an arrangement direction of each row of welding spots is an extension direction of each long edge;
wherein the welding area is provided with 2 to 5 rows of welding spots;
wherein a width of the mask strip body in the extension direction of the short edge ranges from 100 mm to 400 mm;
wherein a width of each of the three skirts in the extension direction of the short edge ranges from 10 mm to 80 mm, and the widths of the skirts in the extension direction of the short edge are the same;
each skirt of the three skirts comprises a first side edge, a second side edge, a third side edge and a fourth side edge, wherein the first side edge and the second side edge are arranged opposite to each other, extension directions of the first side edge and the second side edge are parallel to the extension direction of the short edge, and the first side edge is connected to the short edge of the mask strip body; the third side edge and the fourth side edge are arranged opposite to each other and located between the first side edge and the second side edge;
wherein the third side edge of one end-part skirt of the two end-part skirts is of a straight-line shape parallel to the extension direction of the long edge and coincides with the long edge on one side where the one end-part skirt is located, the fourth side edge of the one end-part skirt is of an arc shape at one end adjacent to the first side edge, and is of a straight-line shape parallel to the extension direction of the long edge at one end adjacent to the second side edge;
the fourth side edge of the other end-part skirt of the two end-part skirts is of a straight-line shape parallel to the extension direction of the long edge and coincides with the long edge on one side where the other end-part skirt is located, the third side edge of the other end-part skirt is of an arc shape at one end adjacent to the first side edge, and is of a straight-line shape parallel to the extension direction of the long edge at one end adjacent to the second side edge; and
the third side edge and the fourth side edge of the middle skirt are each of an arc shape at one end adjacent to the first side edge, and are each of a straight-line shape parallel to the extension direction of the long edge at one end adjacent to the second side edge;
wherein edges of the third side edge and the fourth side edge of the middle skirt having the arc shape abut the welding area.