US 12,338,119 B2
Dual-output microelectromechanical resonator and method of manufacture and operation thereof
George Xereas, Montreal (CA); Vahid Tayari, Montreal (CA); Ahmed Khorshid, Montreal (CA); and Charles Allan, Montreal (CA)
Assigned to Stathera IP Holdings Inc., Montreal (CA)
Filed by Stathera IP Holdings Inc., Montreal (CA)
Filed on Mar. 18, 2024, as Appl. No. 18/608,595.
Application 18/608,595 is a continuation of application No. 18/165,118, filed on Feb. 6, 2023, granted, now 11,932,530.
Application 18/165,118 is a continuation of application No. 17/716,340, filed on Apr. 8, 2022, granted, now 11,584,635, issued on Feb. 21, 2023.
Application 17/716,340 is a continuation of application No. 17/256,525, granted, now 11,305,981, issued on Apr. 19, 2022, previously published as PCT/IB2019/055529, filed on Jun. 28, 2019.
Claims priority of provisional application 62/691,867, filed on Jun. 29, 2018.
Prior Publication US 2024/0253975 A1, Aug. 1, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. B81B 3/00 (2006.01); B81B 7/00 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01)
CPC B81B 3/0021 (2013.01) [B81B 7/0087 (2013.01); H03H 9/02448 (2013.01); B81B 2201/0271 (2013.01); H03H 2009/2442 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A resonating structure comprising:
a substrate;
a resonator body, wherein the resonator body is doped with a dopant having a concentration chosen so as to minimize a second order temperature coefficient of frequency for the resonator body, and wherein the resonator body is operable in an in-plane mode of vibration and an out-of-plane mode of vibration; and
an anchoring body for anchoring the resonator body to the substrate.