US 12,337,599 B2
Head chip, liquid jet head, liquid jet recording device, and method of manufacturing head chip
Tomoaki Hoshi, Chiba (JP); and Yuzuru Kubota, Chiba (JP)
Assigned to SII PRINTEK INC., Chiba (JP)
Filed by Sll Printek Inc., Chiba (JP)
Filed on Sep. 21, 2023, as Appl. No. 18/471,487.
Claims priority of application No. 2022-152423 (JP), filed on Sep. 26, 2022.
Prior Publication US 2024/0100830 A1, Mar. 28, 2024
Int. Cl. B41J 2/14 (2006.01); B41J 2/16 (2006.01)
CPC B41J 2/14209 (2013.01) [B41J 2/1609 (2013.01); B41J 2/1632 (2013.01); B41J 2/164 (2013.01); B41J 2/1642 (2013.01); B41J 2002/14491 (2013.01); B41J 2/1623 (2013.01); B41J 2202/10 (2013.01); B41J 2202/12 (2013.01); B41J 2202/22 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A head chip comprising:
an actuator plate in which a plurality of channels extending in a first direction is arranged in a second direction crossing the first direction; and
an electrode which includes, in the actuator plate, a first electrode part arranged on a first side surface facing to a first side in the second direction in a drive wall configured to partition between the channels adjacent to each other and a second electrode part arranged on a second side surface facing to a second side in the second direction as an opposite side to the first side in the drive wall, and which is configured to deform the drive wall in the actuator plate so as to change a volume of the channel, wherein
when a region in which the first electrode part and the second electrode part are opposed in the second direction to each other across the drive wall, and which is configured to generate an electrical field in the drive wall is defined as an opposed region,
a dimension of the first electrode part in a third direction crossing the first direction when viewed from the second direction is formed so as to decrease in a direction from the drive wall located at the first side in the second direction toward the drive wall located at the second side in the second direction among the plurality of drive walls,
a dimension of the second electrode part in the third direction is formed so as to decrease in a direction from the drive wall located at the second side toward the drive wall located at the first side among the plurality of drive walls, and
a dimension of the opposed region in the first direction decreases in directions from the drive walls located at both end sides in the second direction toward the drive wall located in a central portion in the second direction.
 
9. A method of manufacturing a head chip including
an actuator plate in which a plurality of channels extending in a first direction is arranged in a second direction crossing the first direction, and
an electrode which includes, in the actuator plate, a first electrode part arranged on a first side surface facing to a first side in the second direction in a drive wall configured to partition between the channels adjacent to each other and a second electrode part arranged on a second side surface facing to a second side in the second direction as an opposite side to the first side in the drive wall, and which is configured to deform the drive wall to change a volume of the channel, the method comprising:
a first evaporation step of performing oblique evaporation in an oblique direction crossing the second direction when viewed from the first direction from an evaporation source arranged at the first side in the second direction with respect to the actuator plate, to thereby deposit the first electrode parts on the first side surfaces so that a dimension of the first electrode part in a third direction crossing the first direction when viewed from the second direction decreases in a direction from the drive wall located at a first side in the second direction toward the drive wall located at the second side in the second direction among the plurality of drive walls; and
a second evaporation step of performing oblique evaporation in an oblique direction crossing the second direction when viewed from the first direction from an evaporation source arranged at the second side in the second direction with respect to the actuator plate, to thereby deposit the second electrode parts on the second side surfaces so that a dimension of the second electrode part in the third direction decreases in a direction from the drive wall located at the second side toward the drive wall located at the first side among the plurality of drive walls, wherein
when a region in which the first electrode part and the second electrode part are opposed in the second direction to each other across the drive wall is defined as an opposed region, a dimension in the first direction of the opposed region is decreased in directions from the drive walls located at both sides in the second direction toward the drive wall located in a central portion in the second direction.