US 12,337,415 B2
Method and apparatus for laser texturing a component
Yao-Hung Yang, Santa Clara, CA (US); Chih-Yang Chang, Santa Clara, CA (US); Shannon Wang, Santa Clara, CA (US); and Jianqi Wang, Santa Clara, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 31, 2023, as Appl. No. 18/203,727.
Prior Publication US 2024/0399504 A1, Dec. 5, 2024
Int. Cl. B23K 26/352 (2014.01); B23K 26/122 (2014.01); B23K 26/70 (2014.01)
CPC B23K 26/355 (2018.08) [B23K 26/122 (2013.01); B23K 26/3584 (2018.08); B23K 26/702 (2015.10)] 16 Claims
OG exemplary drawing
 
1. A method of texturing a surface of a component, comprising:
partially submerging the component within a liquid such that a first portion of the component is not submerged in the liquid and a second portion of the component is submerged in the liquid; and
contacting at least the first portion of the component with a laser beam at a power and for a period of time sufficient to texture the first portion of the component to a first surface roughness, wherein the second portion of the component is either not textured by the laser beam, or is textured to a lesser degree than the first portion of the component and has a second surface roughness which is less than the first surface roughness.