US 12,337,356 B2
Moving assembly for recovery guard and substrate processing apparatus
Won Sik Son, Chungcheongnam-do (KR); Pil Kyun Heo, Chungcheongnam-do (KR); and Ho Jong Hwang, Chungcheongnam-do (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on May 25, 2023, as Appl. No. 18/201,934.
Claims priority of application No. 10-2022-0073711 (KR), filed on Jun. 16, 2022.
Prior Publication US 2023/0405648 A1, Dec. 21, 2023
Int. Cl. B08B 13/00 (2006.01); B08B 3/04 (2006.01)
CPC B08B 13/00 (2013.01) [B08B 3/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A moving assembly for a recovery guard, comprising:
a recovery vessel including a first recovery vessel disposed to surround a substrate support and a second recovery vessel disposed inside of the first recovery vessel, concentrically with respect to the first recovery vessel; and
a lifting driver connected to the first and second recovery vessels and elevating the first and second recovery vessels,
wherein the lifting driver includes a motor; a drive shaft connected to the motor and rotated in a first direction; a first shaft connected to the first recovery vessel and extending in a second direction, perpendicular to the first direction; a second shaft connected to the second recovery vessel and extending in the second direction; a first clutch connecting the drive shaft and the first shaft; and a second clutch connecting the drive shaft and the second shaft.