CPC H10N 30/1051 (2023.02) [H03H 9/02015 (2013.01); H03H 9/02535 (2013.01)] | 22 Claims |
1. A package comprising:
an integrated device configured as an acoustic filter, the integrated device comprising:
a substrate comprising a piezoelectric material; and
at least one metal layer coupled to a first surface of the substrate, wherein at least part of the at least one metal layer is configured as a transducer that touches the piezoelectric material of the substrate;
an integrated passive device coupled to the integrated device, wherein the integrated passive device is configured as a cap for the integrated device configured as the acoustic filter, wherein the integrated passive device includes a metal-insulator-metal (MIM) capacitor defined by a first interconnect, an insulation layer, and a second interconnect, and wherein the MIM capacitor is located on a frontside of the integrated passive device; and
a void located between the integrated device and the integrated passive device.
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