US 12,016,169 B2
Optimized static random access memory
Ping-Wei Wang, Hsinchu (TW); Lien Jung Hung, Taipei (TW); Kuo-Hsiu Hsu, Zhongli (TW); Kian-Long Lim, Hsinchu (TW); Yu-Kuan Lin, Taipei (TW); Chia-Hao Pao, Kaohsiung (TW); Chih-Chuan Yang, Tainan (TW); Shih-Hao Lin, Hsinchu (TW); and Choh Fei Yeap, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jun. 16, 2022, as Appl. No. 17/842,208.
Application 17/842,208 is a division of application No. 16/945,443, filed on Jul. 31, 2020, granted, now 11,393,831.
Prior Publication US 2022/0310630 A1, Sep. 29, 2022
Int. Cl. H01L 23/528 (2006.01); G11C 11/412 (2006.01); G11C 11/419 (2006.01); H01L 21/66 (2006.01); H04N 21/426 (2011.01); H10B 10/00 (2023.01); H10B 41/35 (2023.01)
CPC H10B 10/12 (2023.02) [G11C 11/412 (2013.01); G11C 11/419 (2013.01); H01L 22/12 (2013.01); H01L 23/528 (2013.01); H04N 21/42692 (2013.01); H10B 10/00 (2023.02); H10B 41/35 (2023.02); G11C 2213/74 (2013.01); G11C 2213/79 (2013.01); H01L 2924/1437 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A memory cell comprising:
a substrate having a front side and a back side, wherein a transistor of the memory cell is formed on the front side, and wherein the back side is opposite of the front side;
a first interconnect layer on the front side to provide a bit line of the memory cell;
a second interconnect layer on the front side to provide a word line of the memory cell;
a third interconnect layer on the back side to provide a supply voltage to the memory cell; and
a fourth interconnect layer on the back side to provide a ground voltage to the memory cell,
wherein the first interconnect layer corresponds to a first bit line portion of the bit line that abuts a second bit line portion of an adjacent memory cell; and
wherein the third interconnect layer is wider than each of the first interconnect layer and the second interconnect layer.