US 12,016,109 B2
Plasma generator
Changyun Lee, Hwaseong-si (KR); Myoungsoo Kim, Hwaseong-si (KR); Sangchul Han, Suwon-si (KR); and Daeman Seo, Osan-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 19, 2022, as Appl. No. 17/748,152.
Claims priority of application No. 10-2021-0113700 (KR), filed on Aug. 27, 2021.
Prior Publication US 2023/0060486 A1, Mar. 2, 2023
Int. Cl. H05H 1/46 (2006.01)
CPC H05H 1/466 (2021.05) 20 Claims
OG exemplary drawing
 
1. A plasma generator, comprising:
a coaxial tube assembly including a first protrusion at one end of the coaxial tube assembly;
a radio frequency (RF) electrode including a second protrusion at one end of the RF electrode; and
a feed including an inner circumferential surface that defines a first recess at a first end of the feed and a second recess at a second end of the feed, the second end of the feed being an opposite end of the feed in relation to the first end of the feed,
wherein the first protrusion of the coaxial tube assembly is coupled to the first recess of the feed,
wherein the second protrusion of the RF electrode is coupled to the second recess of the feed,
wherein the feed includes one or more first inner surfaces that define a first insertion groove in the inner circumferential surface of the feed at the first end of the feed,
wherein the feed includes one or more second inner surfaces that define a second insertion groove in the inner circumferential surface of the feed at the second end of the feed,
wherein the plasma generator further includes a first coil spring that is at least partially within the first insertion groove and a second coil spring that is at least partially within the second insertion groove, and
wherein the coaxial tube assembly, the RF electrode, and the feed are configured to provide an RF power transmission path based on the feed being coupled between the coaxial tube assembly and the RF electrode.