CPC H01L 29/7851 (2013.01) [H01L 29/0847 (2013.01); H01L 29/155 (2013.01); H01L 29/1608 (2013.01); H01L 29/20 (2013.01); H01L 29/2006 (2013.01); H01L 29/2206 (2013.01); H01L 29/267 (2013.01); H01L 29/66795 (2013.01); H01L 29/7848 (2013.01); H01L 29/785 (2013.01); H01L 29/7854 (2013.01)] | 11 Claims |
1. A semiconductor device comprising:
a substrate including a fin-shaped active region that protrudes from the substrate, the fin-shaped active region including silicon germanium;
a gate electrode on a top surface and both side walls of the fin-shaped active region;
one pair of source/drain regions on the fin-shaped active region; and
a buffer layer between the fin-shaped active region and the source/drain regions, the buffer layer including a compound semiconductor material.
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