US 12,015,038 B2
Solid state imaging element and electronic device
Sozo Yokogawa, Kanagawa (JP)
Assigned to Sony Group Corporation, Tokyo (JP)
Filed by SONY GROUP CORPORATION, Tokyo (JP)
Filed on Apr. 13, 2022, as Appl. No. 17/719,863.
Application 17/719,863 is a continuation of application No. 16/563,582, filed on Sep. 6, 2019, granted, now 11,329,080.
Application 16/563,582 is a continuation of application No. 15/312,069, granted, now 10,411,053, issued on Sep. 10, 2019, previously published as PCT/JP2015/065534, filed on May 29, 2015.
Claims priority of application No. 2014-120205 (JP), filed on Jun. 11, 2014.
Prior Publication US 2022/0238567 A1, Jul. 28, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 27/146 (2006.01); H01L 31/028 (2006.01); H01L 31/0376 (2006.01)
CPC H01L 27/1461 (2013.01) [H01L 27/146 (2013.01); H01L 27/14629 (2013.01); H01L 27/1463 (2013.01); H01L 27/14636 (2013.01); H01L 27/14649 (2013.01); H01L 31/028 (2013.01); H01L 31/03762 (2013.01); H04N 2209/047 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A light detecting device, comprising:
a first isolation structure disposed in a silicon layer;
a second isolation structure disposed in the silicon layer;
a light detecting element disposed in the silicon layer between the first isolation structure and the second isolation structure in a cross-sectional view;
a first concave portion and a second concave portions included in a first surface of the silicon layer, wherein the first and second concave portions are disposed between the first isolation structure and the second isolation structure in the cross-sectional view, wherein the first concave portion is adjacent to the second concave portion in the cross-sectional view;
a third concave portion and a fourth concave portions included in a second surface of the silicon layer in the cross-sectional view; and
a first insulating film comprised of an oxide or a nitride and disposed in the first and second concave portions,
wherein the second surface is opposite the first surface,
wherein the third concave portion is adjacent to the fourth concave portion in the cross-sectional view,
wherein a shape of the first concave portion is different from a shape of the third concave portion in the cross-sectional view, and
wherein a first distance between a center of the first concave portion and a center of the second concave portion is different from a second distance between a center of the third concave portion and a center of the fourth concave portion in the cross-sectional view.