US 12,014,962 B2
Systems and methods for wafer-level photonic testing
Roy Edward Meade, Lafayette, CA (US); Anatol Khilo, Dublin, CA (US); Forrest Sedgwick, Berkeley, CA (US); and Alexandra Wright, Oakland, CA (US)
Assigned to Ayar Labs, Inc., Santa Clara, CA (US)
Filed by Ayar Labs, Inc., Santa Clara, CA (US)
Filed on Jul. 3, 2023, as Appl. No. 18/346,555.
Application 18/346,555 is a continuation of application No. 17/079,357, filed on Oct. 23, 2020, granted, now 11,694,935.
Claims priority of provisional application 62/926,388, filed on Oct. 25, 2019.
Prior Publication US 2023/0343655 A1, Oct. 26, 2023
Int. Cl. H01L 21/66 (2006.01); G01R 31/3185 (2006.01); G02B 6/12 (2006.01); G02B 6/13 (2006.01); H04B 10/073 (2013.01); F21V 8/00 (2006.01); H04B 10/50 (2013.01)
CPC H01L 22/30 (2013.01) [G01R 31/318511 (2013.01); G02B 6/12 (2013.01); G02B 6/13 (2013.01); H04B 10/0731 (2013.01); G02B 6/0028 (2013.01); H04B 10/503 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for fabricating a semiconductor chip, comprising:
fabricating a semiconductor chip on a semiconductor wafer, the semiconductor chip including a photonic device, the semiconductor chip including an optical fiber attachment region in which an optical fiber alignment structure is to be fabricated, the semiconductor chip including an in-plane fiber-to-chip optical coupler positioned at an edge of the optical fiber attachment region, the in-plane fiber-to-chip optical coupler optically connected to the photonic device; and
fabricating a sacrificial optical structure on the semiconductor wafer, the sacrificial optical structure optically coupled to the in-plane fiber-to-chip optical coupler, the sacrificial optical structure including an out-of-plane optical coupler formed in a portion of the semiconductor wafer outside of the optical fiber attachment region, the out-of-plane optical coupler configured to receive input light from a light source external to the semiconductor chip, at least a portion of the sacrificial optical structure extending through the optical fiber attachment region, wherein the sacrificial optical structure is fabricated on the semiconductor wafer before the optical fiber alignment structure is fabricated in the optical fiber attachment region.