US 12,014,940 B2
Substrate treating system and substrate transporting method
Joji Kuwahara, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Jul. 17, 2020, as Appl. No. 16/931,515.
Claims priority of application No. 2019-133794 (JP), filed on Jul. 19, 2019.
Prior Publication US 2021/0020473 A1, Jan. 21, 2021
Int. Cl. H01L 21/67 (2006.01); C23C 16/02 (2006.01); C23C 16/56 (2006.01); G03F 7/16 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67115 (2013.01) [C23C 16/0227 (2013.01); C23C 16/56 (2013.01); G03F 7/162 (2013.01); H01L 21/67173 (2013.01); H01L 21/67178 (2013.01); H01L 21/67745 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A substrate treating system for treating substrates, comprising:
an indexer block where a carrier platform for placing a carrier capable of accommodating the substrates is provided;
a first treating device; and
a second treating device, wherein
the first treating device, the indexer block, and the second treating device are linearly connected in this order in a horizontal direction,
the indexer block includes a substrate buffer for placing the substrates, the substrate buffer being disposed in the middle of the first treating device and the second treating device,
the substrate buffer includes a plurality of substrate platforms arranged vertically so as to overlap one another in plan view,
the plurality of substrate platforms are each configured to place one of the substrates thereon,
the first treating device includes a first substrate transport mechanism having a first band for holding the one of the substrates and being movable for transporting the one of the substrates,
the second treating device includes a second substrate transport mechanism having a second band for holding the one of the substrates and being movable for transporting the one of the substrates,
the first substrate transport mechanism is configured such that the first hand can access the plurality of substrate platforms of the substrate buffer,
the second substrate transport mechanism is also configured such that the second hand can access the plurality of substrate platforms of the substrate buffer,
the indexer block takes one of the substrates from the carrier placed on the carrier platform, and transports the taken one of the substrates to the substrate buffer,
the first treating device receives the one of the substrates from the substrate buffer, performs a predetermined treatment on the received one of the substrates, and transports the one of the substrates treated in the first treating device to the substrate buffer,
the second treating device receives the one of the substrates, transported to the substrate buffer by the first treating device, from the substrate buffer, performs a predetermined treatment on the received one of the substrates, and transports the one of the substrates treated in the second treating device to the substrate buffer, and
the indexer block returns the one of the substrates treated in the second treating device from the substrate buffer to the carrier placed on the carrier platform.