US 12,014,565 B2
Display device including detection sensor and method of manufacturing the detection sensor
Joon-Hwa Bae, Suwon-si (KR); Bonggu Kang, Seoul (KR); Seungbae Kang, Suwon-si (KR); Heesung Yang, Hwaseong-si (KR); Woojin Cho, Yongin-si (KR); and Byoung Kwon Choo, Hwaseong-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-Si (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Nov. 30, 2021, as Appl. No. 17/538,901.
Claims priority of application No. 10-2020-0173400 (KR), filed on Dec. 11, 2020.
Prior Publication US 2022/0188536 A1, Jun. 16, 2022
Int. Cl. G06V 40/13 (2022.01); G06F 1/16 (2006.01); G06F 3/041 (2006.01); G06F 21/32 (2013.01); H01L 27/146 (2006.01)
CPC G06V 40/13 (2022.01) [G06F 1/1626 (2013.01); G06F 3/0412 (2013.01); G06F 21/32 (2013.01); G06V 40/1318 (2022.01); H01L 27/14683 (2013.01); H01L 27/14685 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A method of manufacturing a detection sensor, comprising:
forming a biometric information sensing layer comprising a transistor on a base layer;
forming an initial optical pattern layer on the biometric information sensing layer;
patterning the initial optical pattern layer to form a plurality of transmissive portions spaced apart from each other and having a first zeta potential;
coating a light blocking material to form an initial light blocking portion that covers a side surface and an upper surface of the transmissive portions and has a second zeta potential different from the first zeta potential;
spraying an abrasive having the first zeta potential on the initial light blocking portion; and
polishing the initial light blocking portion such that the upper surface of the transmissive portions is exposed to form a light blocking portion, wherein the initial light blocking portion is polished by the abrasive using a pad,
wherein the light blocking portion comprises light blocking patterns having a concave shape recessed in a direction toward the base layer between the transmissive portions.