US 12,014,335 B2
Maintenance apparatus, maintenance method, and recording medium having recorded thereon maintenance program
Hajime Sugimura, Saitama (JP); and Yuji Sakai, Tokyo (JP)
Assigned to ADVANTEST CORPORATION, Tokyo (JP)
Filed by ADVANTEST CORPORATION, Tokyo (JP)
Filed on Mar. 4, 2022, as Appl. No. 17/686,443.
Application 17/686,443 is a continuation of application No. PCT/JP2020/036748, filed on Sep. 28, 2020.
Claims priority of application No. 2019-178444 (JP), filed on Sep. 30, 2019.
Prior Publication US 2022/0188776 A1, Jun. 16, 2022
Int. Cl. G01R 3/00 (2006.01); G01R 31/00 (2006.01); G01R 31/26 (2020.01); G01R 31/28 (2006.01); G01R 35/00 (2006.01); G06Q 10/20 (2023.01)
CPC G06Q 10/20 (2013.01) [G01R 3/00 (2013.01); G01R 31/001 (2013.01); G01R 31/26 (2013.01); G01R 31/2601 (2013.01); G01R 31/28 (2013.01); G01R 31/2886 (2013.01); G01R 31/2893 (2013.01); G01R 35/00 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A maintenance apparatus comprising:
an acquisition unit configured to acquire a plurality of test results, for at least one jig, in a case where a plurality of devices under measurement, which are different from each other, are sequentially tested via the jig;
a calculation unit configured to calculate a variation in the plurality of test results, for the jig, by using the plurality of test results; and
a determination unit configured to determine maintenance timing of the jig based on the variation in the plurality of test results,
wherein the determination unit is configured to compare the variation in the plurality of test results with a variation in a plurality of test results obtained with the jig in a normal state to calculate a difference between the variation in the plurality of test results with a variation in a plurality of test results obtained with the jig in a normal state, and determine the maintenance timing based on the difference.