US 12,013,412 B2
Inertial measurement unit
Toru Watanabe, Matsumoto (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Nov. 8, 2022, as Appl. No. 17/982,668.
Claims priority of application No. 2021-183112 (JP), filed on Nov. 10, 2021.
Prior Publication US 2023/0147973 A1, May 11, 2023
Int. Cl. G01P 15/08 (2006.01); G01C 19/5783 (2012.01); G01P 1/02 (2006.01); G01P 15/18 (2013.01)
CPC G01P 15/0802 (2013.01) [G01C 19/5783 (2013.01); G01P 1/023 (2013.01); G01P 15/18 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An inertial measurement unit comprising:
a substrate;
a sealing member;
a first inertial sensor module including a first inertial sensor and a first package accommodating the first inertial sensor; and
a second inertial sensor module including a second inertial sensor and a second package accommodating the second inertial sensor, wherein
a material of the first package includes a resin,
a material of the second package is an inorganic material,
the first inertial sensor module is accommodated in a space between the substrate and the sealing member and thus airtightly sealed therein, and
the second inertial sensor module is provided outside the space.