US 12,013,384 B2
Hydrogen sensor and hydrogen sensor manufacturing method
Dong Gu Kim, Suwon-si (KR); Jang Hyeon Lee, Gunpo-si (KR); Dae Sung Kwon, Seoul (KR); Hyun Soo Kim, Yongin-si (KR); Il Seon Yoo, Suwon-si (KR); Tae Ho Jeong, Yongin-si (KR); Woo Young Lee, Seoul (KR); Hyun Sook Lee, Seoul (KR); Se Young Park, Seoul (KR); Soo Min Lee, Seoul (KR); Jin Kyo Jeong, Seoul (KR); and Hae Won Yoon, Seoul (KR)
Assigned to HYUNDAI MOTOR COMPANY, Seoul (KR); KIA CORPORATION, Seoul (KR); and INDUSTRY-ACADEMIC COOPERATION FNDN, YONSEI UNIV, Seoul (KR)
Filed by Hyundai Motor Company, Seoul (KR); Kia Corporation, Seoul (KR); and Industry-Academic Cooperation Foundation, Yonsei University, Seoul (KR)
Filed on Jun. 21, 2022, as Appl. No. 17/807,963.
Claims priority of application No. 10-2021-0144453 (KR), filed on Oct. 27, 2021.
Prior Publication US 2023/0130510 A1, Apr. 27, 2023
Int. Cl. G01N 33/00 (2006.01)
CPC G01N 33/005 (2013.01) [G01N 33/0016 (2013.01); G01N 2033/0019 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for manufacturing a hydrogen sensor, the method comprising the steps of:
disposing a thin film made of a transition metal or an alloy thereof on a surface of an elastic substrate;
applying a tensile force in a repetitive manner to the elastic substrate to form a nanocrack on the thin film disposed on the surface of the elastic substrate; and
injecting hydrogen gas into the formed nanocrack and then removing the hydrogen gas to form a nanogap,
wherein the tensile force in the step of forming a nanocrack is applied to an extent that the elastic substrate has a tensile strain of 25% to 100%.