US 12,013,304 B2
Electronic force and pressure sensor devices having flexible layers
Jeffrey Krotosky, Lewisville, TX (US); and Zhihua Cai, Plano, TX (US)
Assigned to PRECISION BIOMEMS CORPORATION, Addison, TX (US)
Filed by PRECISION BIOMEMS CORPORATION, Addison, TX (US)
Filed on Jul. 27, 2021, as Appl. No. 17/386,491.
Claims priority of provisional application 63/057,130, filed on Jul. 27, 2020.
Prior Publication US 2022/0026290 A1, Jan. 27, 2022
Int. Cl. G01L 1/18 (2006.01); G01K 7/22 (2006.01); G01L 9/00 (2006.01); G01L 19/00 (2006.01); G01N 27/22 (2006.01); H05K 1/02 (2006.01); H05K 1/03 (2006.01)
CPC G01L 9/0052 (2013.01) [G01K 7/22 (2013.01); G01L 1/18 (2013.01); G01L 9/0055 (2013.01); G01L 19/0092 (2013.01); G01N 27/221 (2013.01); G01N 27/223 (2013.01); H05K 1/0277 (2013.01); H05K 1/0283 (2013.01); H05K 1/0393 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A flexible electronic force sensor device comprising:
a first flexible layer formed of a first flexible material and defining a membrane portion surrounded by a body portion;
wherein the body portion is less flexible than the membrane portion;
wherein the membrane portion is configured in a circular shape, viewed in the Z-direction;
a first conductive layer formed on the first flexible layer, the first conductive layer including a first pair of piezoresistors and a second pair of piezoresistors formed on respective regions of the membrane portion;
wherein the first pair of piezoresistors are disposed on first regions of the membrane portion that are relatively less strained by an external force applied to the membrane portion and the second pair of piezoresistors are disposed on second regions of the membrane portion that are relatively more strained by the external force applied to the membrane portion such that when the external force is applied to the membrane portion the piezoresistors of the second pair are strained more that the piezoresistors of the first pair and a resistance value of the piezoresistors of the second pair changes more that the resistance value of the piezoresistors of the first pair, wherein the first regions for the first pair of piezoresistors are positioned relatively closer to the body portion than the second regions for the second pair of piezoresistors;
a second flexible layer formed of a second flexible material over at least some of the first conductive layer;
a second conductive layer formed on the second flexible layer and disposed at least partially over the body portion;
wherein the first and second flexible layers comprise at least one of polyimides, epoxy-based resists, liquid crystal polymers, polymeric organosilicon compounds, thermoplastics, or other polymer type materials;
wherein the first and second conductive layers include electrical tabs that interconnect the piezoresistors into an electrical circuit arrangement extending from the membrane portion to terminals disposed in the body portion;
wherein the electrical tabs that interconnect the piezoresistors into an electrical circuit arrangement comprise:
arcuate portions disposed along a periphery of the flexible membrane portion; and
radial portions disposed across the flexible membrane portion, the radial portions electrically connecting the arcuate portions to a piezoresistor of the second pair of piezoresistors;
wherein the first and second conductive layers are interconnected through conductive vias formed through the second flexible layer;
wherein the first and second flexible layers and first and second conductive layers collectively form a device configured as a flexible sheet; and
wherein applying an input voltage to the electrical circuit arrangement results in a variable output voltage at the terminals that corresponds to the difference in change of the resistance values between the first and second pair of piezoresistors that can be correlated to the external force applied to the membrane portion.