US 12,013,230 B2
Three-dimensional shape measuring apparatus
Takashi Suzuki, Osaka (JP); and Shinya Takahashi, Osaka (JP)
Assigned to KEYENCE CORPORATION, Osaka (JP)
Filed by Keyence Corporation, Osaka (JP)
Filed on Feb. 18, 2022, as Appl. No. 17/674,953.
Claims priority of application No. 2021-063482 (JP), filed on Apr. 2, 2021.
Prior Publication US 2022/0316867 A1, Oct. 6, 2022
Int. Cl. G01B 11/25 (2006.01); G06T 7/521 (2017.01); G06T 7/55 (2017.01)
CPC G01B 11/254 (2013.01) [G01B 11/2522 (2013.01); G06T 7/521 (2017.01); G06T 7/55 (2017.01)] 15 Claims
OG exemplary drawing
 
1. A three-dimensional shape measuring apparatus comprising:
a stage having an upper surface for a measurement subject to be placed thereon;
a projector configured to irradiate the measurement subject with pattern light having a periodic pattern a plurality of times from a position obliquely above while shifting a phase of the pattern light;
a camera that has an optical axis orthogonal to the upper surface of the stage, receives, through a telecentric optical system, pattern light reflected from the measurement subject when the measurement subject is irradiated with the pattern light a plurality of times from the projector, and captures an image of the measurement subject a plurality of times to generate a plurality of pieces of image data;
a rotation unit configured to include a chuck that holds the measurement subject and a rotation motor that rotates the chuck about a rotation axis intersecting the optical axis of the camera, the rotation unit being attached to an end portion of the stage; and
a processor that receives selection by a user from a first control mode in which measurement of the measurement subject is performed in a state where the measurement subject is placed on the upper surface of the stage and a second control mode in which measurement of the measurement subject is performed in a state where the measurement subject is held by the chuck, and when the first control mode is selected by the user, controls the projector and the camera to generate the plurality of pieces of image data in a state where the measurement subject is placed on the upper surface of the stage, and generates three-dimensional shape data based on the plurality of pieces of image data generated by the camera, and when the second control mode is selected by the user, controls the projector, the camera, and the rotation unit to rotate the measurement subject about the rotation axis and generate the plurality of pieces of image data in a state where the measurement subject is held by the chuck, and generates three-dimensional shape data based on the plurality of pieces of image data generated by the camera.