US 12,012,654 B2
Device for coating a substrate with a carbon-containing coating
Alexandre Jouvray, Huntingdon (GB); and Matthew Perry, Market Harborough (GB)
Assigned to AIXTRON SE, Herzogenrath (DE)
Appl. No. 17/051,871
Filed by AIXTRON SE, Herzogenrath (DE)
PCT Filed Apr. 30, 2019, PCT No. PCT/EP2019/061065
§ 371(c)(1), (2) Date Oct. 30, 2020,
PCT Pub. No. WO2019/211280, PCT Pub. Date Nov. 7, 2019.
Claims priority of application No. 10 2018 110 348.4 (DE), filed on Apr. 30, 2018; and application No. 10 2018 110 350.6 (DE), filed on Apr. 30, 2018.
Prior Publication US 2021/0189565 A1, Jun. 24, 2021
Int. Cl. C23C 16/26 (2006.01); C23C 16/455 (2006.01); C23C 16/46 (2006.01); C23C 16/52 (2006.01); C23C 16/54 (2006.01)
CPC C23C 16/46 (2013.01) [C23C 16/26 (2013.01); C23C 16/45502 (2013.01); C23C 16/52 (2013.01); C23C 16/545 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A device for guiding a substrate (2) into or out of a substrate treatment device (1), the device comprising:
a first gap delimiting body (110) comprising a first base body (114), the first base body (114) comprising a first planar surface (115), a first oblique surface (121) and a second oblique surface (122), wherein the first oblique surface (121) and the second oblique surface (122) are each oblique to the first planar surface (115), extend in a first plurality of parallel planes, and are connected to one another by the first planar surface (115); and
a second gap delimiting body (111) comprising a second base body (114′), the second base body (114′) comprising a second planar surface (115′), a third oblique surface (121′) and a fourth oblique surface (122′), wherein the third oblique surface (121′) and the fourth oblique surface (122′) are each oblique to the second planar surface (115′), extend in a second plurality of parallel planes, and are connected to one another by the second planar surface (115′),
wherein the first planar surface (115) and the second planar surface (115′) are spaced apart by a gap (112) with a gap width (w),
wherein the first oblique surface (121) abuts the fourth oblique surface (122′),
wherein the second oblique surface (122) abuts the third oblique surface (121′), and
wherein the first gap delimiting body (110) and the second gap delimiting body (111) are displaceable in a direction of respective slopes of the first, second, third and fourth oblique surfaces (121, 122, 121′, 122′) in order to adjust the gap width (w).