CPC C09K 11/65 (2013.01) [B82B 3/008 (2013.01); C01B 32/26 (2017.08); C01B 32/28 (2017.08); C23C 14/0611 (2013.01); C23C 14/48 (2013.01); C23C 14/5806 (2013.01); C23C 14/5853 (2013.01); C30B 31/20 (2013.01); C30B 33/00 (2013.01); B82Y 20/00 (2013.01); B82Y 40/00 (2013.01); C01P 2002/72 (2013.01); C01P 2002/86 (2013.01); C01P 2004/04 (2013.01); C01P 2004/64 (2013.01); G01N 2021/6439 (2013.01)] | 16 Claims |
1. A method of fluorescent nanodiamonds production comprising:
a first operation of preparing nanodiamonds having an average particle diameter of 10 nm or less;
a second operation of implanting plasma ions into the nanodiamonds, wherein the second operation is performed at a plasma ion implantation voltage of −10 kV or more and −40 kV or less;
a third operation of heat-treating the nanodiamonds implanted with the plasma ions under a vacuum or in an inert gas atmosphere;
a fourth operation of oxygen treatment of the heat-treated nanodiamonds in the presence of oxygen to oxidize a surface of the nanodiamonds;
a fifth operation of acid-treating the oxygen-treated nanodiamonds; and
a sixth operation of centrifuging, cleaning, and drying the acid-treated nanodiamonds;
wherein, in the second operation, the plasma ions are implanted at an incident ion dose of 1013 ions/cm2 or greater and 1020 ions/cm2 or less.
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