US 12,012,329 B2
Carbyne-based sensing device for high spatial resolution in DNA sequencing and biomolecule characterization and method of fabricating the same
Steve Tung, Fayetteville, AR (US); Bo Ma, Fayetteville, AR (US); and Ty Seiwert, Fayetteville, AR (US)
Assigned to Board of Trustees of the University of Arkansas, Little Rock, AR (US)
Filed by Steve Tung, Fayetteville, AR (US); Bo Ma, Fayetteville, AR (US); and Ty Seiwert, Fayetteville, AR (US)
Filed on Feb. 11, 2021, as Appl. No. 17/173,839.
Claims priority of provisional application 62/975,894, filed on Feb. 13, 2020.
Prior Publication US 2021/0253420 A1, Aug. 19, 2021
Int. Cl. B81C 1/00 (2006.01); B32B 7/02 (2019.01); B32B 7/12 (2006.01); B81C 3/00 (2006.01); C12Q 1/6869 (2018.01)
CPC B81C 1/00071 (2013.01) [B32B 7/02 (2013.01); B32B 7/12 (2013.01); B81C 3/001 (2013.01); C12Q 1/6869 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method of fabricating a sensing device for DNA sequencing and biomolecule characterization comprising the steps of:
fabricating a microelectrode chip comprising a silicon substrate and a silicon nitride diaphragm;
attaching a monolayer graphene sheet to said silicon nitride diaphragm;
dicing a portion of said monolayer graphene sheet to form a graphene microribbon;
converting said graphene microribbon to a graphene nanoribbon; and
converting said graphene nanoribbon to a carbyne.