US 12,011,829 B2
Substrate transport with unequal number of drive shafts and arm links
Scott Wilkas, Lexington, MA (US); Martin Hosek, Lowell, MA (US); and Jacob Lipcon, Arlington, MA (US)
Assigned to Persimmon Technologies Corporation, Wakefield, MA (US)
Filed by Persimmon Technologies Corporation, Wakefield, MA (US)
Filed on Oct. 14, 2022, as Appl. No. 17/965,907.
Application 17/965,907 is a continuation of application No. 15/212,441, filed on Jul. 18, 2016, granted, now 11,584,000.
Claims priority of provisional application 62/193,293, filed on Jul. 16, 2015.
Prior Publication US 2023/0032442 A1, Feb. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B25J 9/04 (2006.01); B25J 9/10 (2006.01); B25J 11/00 (2006.01); H01L 21/677 (2006.01)
CPC B25J 9/042 (2013.01) [B25J 9/104 (2013.01); B25J 11/0095 (2013.01); H01L 21/67742 (2013.01)] 21 Claims
OG exemplary drawing
 
19. An apparatus comprising:
a substrate transport arm comprising:
a first link;
a second link rotatably connected to the first link;
a third link rotatably connected to the second link at a wrist joint, where the third link comprises an end effector configured to support a substrate thereon; and
a mechanical transmission comprising a pulley, where the mechanical transmission is connected to the third link to control rotation of the third link on the second link, where the mechanical transmission is configured to control rotation of the third link on the second link as a function of an angle between the first and second links, where the substrate transport arm is configured such that the rotation of the third link relative to the second link is completely mechanically dependent upon, with the mechanical transmission on the second link, rotational location of the second link on the first link; and
a drive connected to the first link and the second link, where the drive comprises at least two coaxial drive shafts, and at least one transmission belt connects one of the drive shafts to the pulley with at least one drive pulley connected to the second link,
where the substrate transport arm has a first number of the links connected in series forming the arm, where the drive has a different second number of the coaxial drive shafts, and where the second number is less than the first number.