US 12,011,743 B2
Lower-surface brush, brush base and substrate cleaning device
Takashi Shinohara, Kyoto (JP)
Assigned to SCREEN HOLDINGS CO., LTD., (JP)
Filed by SCREEN HOLDINGS CO., LTD., Kyoto (JP)
Filed on Nov. 15, 2021, as Appl. No. 17/526,026.
Claims priority of application No. 2020-196045 (JP), filed on Nov. 26, 2020.
Prior Publication US 2022/0161299 A1, May 26, 2022
Int. Cl. B08B 1/12 (2024.01); A46B 13/00 (2006.01); A46B 13/02 (2006.01); B08B 1/20 (2024.01)
CPC B08B 1/12 (2024.01) [A46B 13/008 (2013.01); A46B 13/02 (2013.01); B08B 1/20 (2024.01); A46B 2200/3073 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A lower-surface brush used to clean a first lower surface of a substrate, comprising:
a base portion having a first upper surface;
a first cleaning portion that is provided on the first upper surface of the base portion to project upwardly from the first upper surface of the base portion and extend in one direction through a geometric center of the base portion in a plan view; and
a second cleaning portion provided on the first upper surface of the base portion to project upwardly from the first upper surface of the base portion and extend along an outer edge of the base portion,
wherein the base portion on which the first cleaning portion is provided and the base portion on which the second cleaning portion is provided are a common member.