US 12,336,324 B1
Device for mass transfer of mini light-emitting diodes (mini-LEDs) based on array water jet-based ejection
Yun Chen, Guangzhou (CN); Yanhui Chen, Guangzhou (CN); Li Ma, Guangzhou (CN); Pengwei Lv, Guangzhou (CN); Hao Zhang, Guangzhou (CN); Maoxiang Hou, Guangzhou (CN); and Xin Chen, Guangzhou (CN)
Assigned to Guangdong University of Technology, Guangzhou (CN)
Filed by Guangdong University of Technology, Guangzhou (CN)
Filed on Feb. 25, 2025, as Appl. No. 19/063,218.
Application 19/063,218 is a division of application No. 18/769,404, filed on Jul. 11, 2024, granted, now 12,261,239.
Claims priority of application No. 202310992493.0 (CN), filed on Aug. 8, 2023.
Int. Cl. H10H 20/01 (2025.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01); H01L 25/075 (2006.01)
CPC H10H 20/01 (2025.01) [H01L 21/681 (2013.01); H01L 21/6835 (2013.01); H01L 25/0753 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A device for mass transfer of mini light-emitting diodes (Mini-LEDs) based on array water jet-based ejection, comprising:
a planar motion platform operating on an X-Y plane;
a vision camera;
an array water jet-type ejection unit;
a Z-axis motion platform;
a blue membrane;
an operation platform; and
a transfer substrate;
wherein the vision camera and the array water jet-type ejection unit are provided on a side of the planar motion platform;
the array water jet-type ejection unit comprises a water jet channel and a through-hole array;
the Z-axis motion platform is provided at the side of the planar motion platform where the vision camera is provided, and is spaced from the planar motion platform; and the Z-axis motion platform is configured for placement of the blue membrane;
a plurality of Mini-LED chips uniformly distributed are bonded to a surface of the blue membrane;
the operation platform is spacedly provided at a side of the Z-axis motion platform away from the planar motion platform; and
the transfer substrate is fixedly provided on a side of the operation platform near the Z-axis motion platform.